WTR(Wafer Transfer Robot)는 반도체 라인에서 웨이퍼를 이송하는 장치로, FOUP ↔ Buffer 사이 또는 상하좌우로 수직 이동하여 이송합니다.

【ITR ↔ BUFFER】

• PUT two wafers (before process) on Buffer
• GET two wafers (after process) from Buffer
• Transferring 1 wafer is also possible.

【PTR ↔ PROCESS CHAMBER】

• Processing of one wafer per chamber

【BUFFER ↔ PTR】

• PUT two wafers (before process) on Buffer
• GET two wafers (after process) from Buffer