Ultrasonic Precision Control
- Ultrasonic time-of-flight measurement technology
- High-resolution motor with multi-PID control
- Stable precision control across high-speed and low-flow ranges
Liquid Flow Controller (LFC)
SEMISOL's Liquid Flow Controller (LFC) combines ultrasonic time-of-flight measurement and precision motor control to provide fast, stable flow control for chemical processes. Separated and integrated configurations support different installation conditions and operating requirements while maintaining compatibility with existing chemical supply systems.
- Flexible system configurations for different process and installation conditions
- L1, L2, and L3 product line-up for different operating requirements
- Compatibility and scalability with existing chemical supply systems
Key Technologies & Advantages
Fast Response & External Interface
- Real-time flow signal output based on control results
- Fast response to setpoint changes and pressure fluctuations
- Stable operation across different process environments
Process Stability
- Dual-verification structure for improved operating safety
- Preventive design to minimize process risk during flowmeter or valve faults
Chemical-Resistant Design
- PTFE fluoropolymer applied to wetted parts
- High chemical and corrosion resistance
- Construction suitable for corrosive chemical fluids
Model Line-up
LFC Type - L1 Separated Type
LFC Type - L2 Separated Type
LFC Type - L3 Integrated Type
Specification
| Item | 4 | 8 | 15 | 20 | 25 |
|---|---|---|---|---|---|
| Connection Size | Tube 1/4" | Tube 3/8" | Tube 1/2" | Tube 3/4" | Tube 1" |
| Flowmeter Dimension | 139×110×39 | 139×110×39 | 172×110×20 | 176×110×39 | 182×110×39 |
| FCV Dimension | 144 | 148 | 154 | 162 | 186 |
| 49 | 59 | 73.4 | |||
| 11 | 15 | 17.5 | 22 | 27 | |
| 18 | 20 | 27 | 31 | 42 | |
| 4 | 6 | ||||
| 63 | 87 | 105.4 | |||
| 32 | 40 | 52 | |||
| 2-Ø5.5 | 4-Ø6.5 | ||||
| 40 | 50 | 64.4 | |||
| Type | Super 300 | ||||
| Body Material | PFA / PTFE | ||||
| Control Flow Range | 10–300 | 100–2000 | 0.50–10.00 | 1.0–20.00 | 5–50.00 |
| 25–500 | 150–3000 | 0.75–15.00 | 1.5–30.00 | — | |
| 50–1000 | 250–5000 | — | — | — | |
| 100–2000 | — | — | — | — | |
| Fluid Temperature | 10–100°C | 10–100°C | 10–100°C | 10–100°C | 10–100°C |
| Ambient Temperature | 10–50°C | 10–50°C | 10–50°C | 10–50°C | 10–50°C |
| Fluid Pressure | 0.1~0.3 MPa (inlet supply pressure) | ||||
| 0.05 MPa differential pressure | 0.1 MPa differential pressure | ||||
| Measurement Accuracy | 0~100 mL/min ±1 mL/min | 0~400 mL/min ±4 mL/min | 0~600 mL/min ±6 mL/min | 0~2.0 L/min ±20 mL/min | 0~5.0 L/min ±50 mL/min 0~8.0 L/min ±80 mL/min |
| 100~3000 mL/min ±1% of RD | 400~4000 mL/min ±1% of RD | 600~8000 mL/min ±1% of RD | 2.0~20.0 L/min ±1% of RD | 5.0~50.0 / 8.0~80.0 L/min ±1% of RD | |
| Trigger Input Voltage | 24 V Pulse Trigger | 24 V Pulse Trigger | 24 V Pulse Trigger | 24 V Pulse Trigger | 24 V Pulse Trigger |
| Trigger Frequency | 2.0 MHz | ||||
| Receiver Output Voltage | Min. 200 mV | Min. 250 mV | Min. 300 mV | Min. 350 mV | Min. 420 mV |
| ±5% @ 2 MHz | |||||
| Actuator | Stepping Motor | ||||
| Flowmeter | Ultrasonic Flowmeter | ||||
| Measurement Method | Transit-time differential method | ||||
| Fluid | DIW / Chemical (specify the applicable fluid separately) | ||||
| Specific Gravity | 1 | ||||
| Viscosity | 1.0 cp | ||||
| Valve Operating Speed | Forced opening: approximately 1.5 sec | ||||
| Control response: approximately 1 sec | Control response: approximately 2 sec | ||||