Inline Mixing System (IMS)
IMS (Inline Mixing System) is a program-controlled system that mixes and supplies chemicals at the concentration and temperature required by semiconductor cleaning processes. Integrated flow-control components and temperature sensors provide precise management of process-specific chemical conditions.
- Supports H₂O₂, HCl, NH₄OH, DIW, and other process chemicals
- Integrated control of flow control valves, flow meters, and temperature sensors
- Concentration and temperature control tailored to each process
- Flexible channel configuration for inline mixing applications
System Configuration
Concentration and Temperature Control
- Precise chemical supply based on user-defined concentration and temperature settings
- Program-based management of process operating conditions
Integrated Inline Mixing Control
- Channel-level integration of flow control valves, flow meters, and temperature sensors
- Stable mixing control using real-time flow and temperature data
ECSC-IMS / ECSC-IMS-FMC
- System configurations for different chemicals and supply channel requirements
- Two product configurations tailored to process and installation conditions
Model Configuration
