ALS

Heat Exchanger & Chemical Circulator

ALS is a precision 3-axis tilt control module based on a high-performance servo system and high-precision LM guide. It can be applied to various applications such as precise control, quantitative transfer, and uniform distribution adjustment in semiconductor and precision equipment processes.

  • High Repeatability & Accuracy Control
  • Improved uniformity adjustment limits with a 3-axis tilt structure
  • Easy grease application (Auto Lubrication)
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Product Information

A. Specification

Specification Specification

B. Test Jig & Motion Control Box

Test Jig & Motion Control Box

C. Test Data(Repeatability Accuracy < 5㎛)

Test Data acc Test Data acc

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