ALS
ALS is a precision 3-axis tilt control module based on a high-performance servo system and high-precision LM guide. It can be applied to various applications such as precise control, quantitative transfer, and uniform distribution adjustment in semiconductor and precision equipment processes.
- High Repeatability & Accuracy Control
- Improved uniformity adjustment limits with a 3-axis tilt structure
- Easy grease application (Auto Lubrication)
Product Information
A. Specification
B. Test Jig & Motion Control Box
C. Test Data(Repeatability Accuracy < 5㎛)