INNORES
INNORES O-rings are high-temperature and chemical-resistant products optimized for semiconductor equipment.
Based on various FKM and FFKM materials, they can be customized to meet specific customer requirements.
A wide range of precision parts such as slit valve plates, ground straps, and rollers are also available.
- High Quality Product
- Optimizing R&D Center
- Quality Control
- Customer Relationship and Support (Major Customer: Samsung, SK Hynix, and Tool Makers, etc.)
Specification
Compound & Color
| Compound | Color |
|---|---|
| INS-1367 | Brown |
| INS-1271 | Translucent Beige |
| INS-2360 | Brown |
| IR-101 | Purple |
| SL-8000 | Black |
| SL-7000 | Black |
| EL-270 | Light Brown |
| KI-100 | Amber Translucent |
| 5275 | White / Black |
| 6065 | White |
| 5080 | White / Black |
| DIR-70 | Translucent |
| F-972 | White / Black |
| F575 | Black |
Mechanical Properties
| Code | Tensile (MPa) |
Elong. (%) |
Modulus (MPa) |
|---|---|---|---|
| INS-1367 | 16.75 | 248 | 3.71 |
| INS-1271 | 16.98 | 206 | 5.0 |
| INS-2360 | 14.23 | 188 | 4.23 |
| IR-101 | 15.7 | 165 | 8.10 |
| SL-8000 | 20.1 | 138 | 13.8 |
| SL-7000 | 22.3 | 132 | 14.1 |
| EL-270 | 15.2 | 240 | 4.2 |
| KI-100 | 15.4 | 280 | 7.3 |
| 5275 | 21 | 170 | 8.5 |
| 6065 | 28.5 | 205 | 6.1 |
| 5080 | 19.8 | 155 | 13.9 |
| DIR-70 | 19.8 | 214 | 8.1 |
| F-972 | 21 | 230 | 8.8 |
| F575 | 18 | 180 | 10.5 |
Thermal & Compression Properties
| Code | Hardness Shore A (±5) |
Comp. Set #214 / 70 h @ 200℃ |
Max Temp. (℃) |
|---|---|---|---|
| INS-1367 | 64 | 15 | 315 |
| INS-1271 | 70 | 15 | 310 |
| INS-2360 | 68 | 15 | 320 |
| IR-101 | 75 | 12 | 325 |
| SL-8000 | 75 | 6 | 330 |
| SL-7000 | 76 | 8 | 330 |
| EL-270 | 70 | 16 | 320 |
| KI-100 | 75 | 13 | 315 |
| 5275 | 76 | 19 | 300 |
| 6065 | 64 | 22 | 300 |
| 5080 | 82 | 18 | 300 |
| DIR-70 | 70 | 15 | 300 |
| F-972 | 75 | 16 | 220 |
| F575 | 75 | 15 | 200 |