Direct Liquid Injection
- Precision liquid precursor injection and high-performance vaporization
- Uniform aerosol generation across various precursor properties
AUPV Series
Precision Liquid Precursor Vaporization · Direct Liquid Injection
ASK Ultra Performance Vaporizer (AUPV) is a high-performance liquid precursor vaporization system for precision process applications. Direct Liquid Injection (DLI) technology produces uniform aerosol particles across a wide range of precursor characteristics.
Its U-shaped heat exchanger creates and supplies a stable vapor stream to reduce process defects, supporting semiconductor, display, solar cell, energy, medical, and other liquid-precursor applications.
Key Technologies & Features
U-shaped Heat Exchanger
- Stable and uniform vapor stream generation
- Reduced vaporization variation and process defects
Precision Heater Control
- Stable thermal control based on a single vaporization chamber
- Single- or dual-heater configurations by model
Broad Process Coverage
- Semiconductor, display, and solar cell processes
- Liquid precursor applications in energy and medical fields
Model Line-up
M200PSingle chamber · Dual heater
M200BPSingle chamber · Dual heater
M201PSingle chamber · Single heater
Model Specification
| ASK Model | M200P | M200BP | M201P |
|---|---|---|---|
| Control Valve | Option | Option | Option |
| Dimensions (mm) | 114 × 246.71 × 123.75 | 207.7 × 102.5 × 197.1 | 219.51 × 80.0 × 98.45 |
| Carrier Inlet Fitting | 1/4 in. VCR Female | 1/4 in. VCR Female | 1/4 in. VCR Female |
| Liquid Inlet Fitting | 1/8 in. VCR Female | 1/8 in. VCR Female | 1/8 in. VCR Female |
| Vapor Outlet Fitting | 1/4 in. VCR Female | 1/4 in. VCR Female | 1/4 in. VCR Female |
| Compressed Air Fitting | 4 mm Instant Tube Fitting | 4 mm Instant Tube Fitting | 4 mm Instant Tube Fitting |
| Leak Integrity | <1×10⁻⁹ Pa·m³/s (He) | <1×10⁻⁹ Pa·m³/s (He) | <1×10⁻⁹ Pa·m³/s (He) |
| Carrier Gas | Inert gas recommended | Inert gas recommended | Inert gas recommended |
| Max Carrier Gas Flow | 15 SLM N₂ (0–80 psig inlet) | 15 SLM N₂ (0–80 psig inlet) | 15 SLM N₂ (0–80 psig inlet) |
| Max Liquid Flow Rate | 10 g/min (TEOS equivalent) | 10 g/min (TEOS equivalent) | 10 g/min (TEOS equivalent) |
| System Pressure Limit | 150 psig | 150 psig | 150 psig |
| Compressed Air Pressure | 90–110 psig | 90–110 psig | 90–110 psig |
| Heater Power | 220 VAC, 60 Hz 300 W × 1 / 200 W × 1 | 220 VAC, 60 Hz 300 W × 1 / 200 W × 1 | 220 VAC, 60 Hz 300 W × 1 |
| Temperature Range | 40–180°C | 40–180°C | 40–180°C |
| Vaporizer Body | SS316 Construction | SS316 Construction | SS316 Construction |
| Wetted Parts | SS316, PEEK, PTFE, Viton | SS316, PEEK, PTFE, Viton | SS316, PEEK, PTFE, Viton |
| Temperature Sensor | Thermocouples K Type × 2 | Thermocouples K Type × 2 | Thermocouples K Type × 1 |
AVDS System Integration
AVDS integrates GMFC/LMFC-based gas and liquid flow control with AUPV to deliver a uniform, high-quality vapor stream across a broad range of liquid precursors.
Application & Precursor Guide
| Applicable film | Function / Purpose | Film material | Fluid material | Vaporizer |
|---|---|---|---|---|
| High-K | Gate insulator, Capacitor | HfO2, ZrO2, La2O3, AL2O3, Others | HTB, TDEAH, TEMAH, TEMAZ, Others | AUPV-L100 |
| Insulator film | Protective film, Insulator film | SiO2, SiN, PSG, BPSG | TEOS, TEB, TEPO, Others | AUPV-M200 |
| High-permittivity film, Ferroelectric film | Capacitor | Ta2O5, BST, PZT, SBT | Al(C2H5)6, Ba(DPM)2, Sr(DPM)2, Pb(DPM)2, Others | AUPV-M200 |
| Low-K | Interlayer insulation sheet | Various materials | DVS-BCB, TMCTS, Others | AUPV-M200 |
| Others | Various applications | Various materials | High flow DIW(H2O) | AUPV-H300 |