Cooling Unit
A unit used in semiconductor processes to cool high-temperature chemicals to lower temperatures and discharge them after a designated cooling period.
- High-performance cooling system designed to cool high-temperature process chemicals to a specified temperature range
- Stable and reliable temperature control through an efficient heat dissipation structure
- Temperature management solution optimized for semiconductor chemical process environments
Specification
Main Body
| Item | Specification | Remark |
|---|---|---|
| Body | FM PVC White | - |
| PLC | MITSUBISHI | - |
Utility
| Item | Specification | Remark |
|---|---|---|
| Power | 220V, 15A, 1 Phase | - |
| Exhaust | 150A PVC | - |
| Drain Line | 16A General PVC | - |
| CDA Line | 1/2" SUS Tube, Lock Type | - |
| N₂ Line | 1/2" SUS Tube, Lock Type | - |
| Tower Drain-1, -2 | 3/4" PFA Tube | 40A PVC Double Pipe |
| Drain for CDS | 1" PFA Tube | 40A PVC Double Pipe |
| Drain-1, -2 | 3/4" PFA Tube | 40A PVC Double Pipe |
| Chem Drain-1, -2 | 3/4" PFA Tube | 40A PVC Double Pipe |
| PCW | 3/4" SUS Tube, Lock Type | - |
| DIW | DN25 PVDF | - |
Chemical
| Item | Specification | Remark |
|---|---|---|
| Used Chemical | Customer specification | - |
| Cooling Tank | PTFE 60 L | - |
| Temperature | 85°C | - |
| Level Sensor | Liquid-level photo sensor | - |
| Pump | Bellows Pump | 5~100°C, 30 LPM |