Equipment Front End Module (EFEM)
The Equipment Front End Module (EFEM) is a standard interface system that transfers wafers from the FOUP to semiconductor process modules. Its controlled mini-environment protects wafer cleanliness throughout handling and supports stable equipment productivity.
- Load Port: 300 mm wafer FOUP handling with N2 purge support
- ITR (Index Transfer Robot): wafer transfer between the FOUP and process module
- FOUP opener compatibility and door interlock safety functions
System Configuration
EFEM
A controlled mini-environment integrating wafer handling and the equipment front-end interface
ITR Index Transfer Robot
Precision wafer transfer between the Load Port and process module
LP Load Port
300 mm wafer FOUP handling with N2 purge support
Mini-Environment Airflow Control
01 Outside Air Intake
Outside air enters the EFEM enclosure
02 Primary Filtration
The internal filter performs the first filtration stage
03 Secondary Filtration
The FFU (Fan Filter Unit) draws and filters the air a second time
04 Air Ionization
The ionizer reduces static electricity within the airflow
05 Exhaust
Contaminated air is discharged from the enclosure
06 Particle Control
FFU and ionizer operation minimizes particles and maintains the mini-environment
Specification
| Size | 2,370(W) × 790(D) × 2,927(H) mm |
|---|---|
| Weight | 1.5 ton (including Load Ports) |
| Power | GPS: 208 V, 3-phase, 50/60 Hz, 40 A (14.4 kW) UPS: 208 V, single-phase, 50/60 Hz, 20 A (4.2 kW) |
| C/Height | 3 Floor |
| CDA / Vacuum | 0.6 MPa / -60 kPa |
| PN2 | 0.5-0.6 MPa |
| Load Port | 4 Port |
| Wafer | 300 mm Wafer FOUP, N2 Purge |
| Material | SS400, Aluminium |
| Camera | External 2 ea / Internal 3 ea |
| Color | White |
| Sensor | Curtain Type |
| Safety | EMO, EMS, Alarm, Lamp, Fire Alarm |
| Monitor | Swing Arm, Touch Type |