WTR (Wafer Transfer Robot) is a device used to transfer wafers in semiconductor production lines. It moves wafers between the FOUP and buffer stations, and performs vertical and horizontal transfers as needed.

【ITR ↔ BUFFER】

• PUT two wafers (before process) on Buffer
• GET two wafers (after process) from Buffer
• Transferring 1 wafer is also possible.

【PTR ↔ PROCESS CHAMBER】

• Processing of one wafer per chamber

【BUFFER ↔ PTR】

• PUT two wafers (before process) on Buffer
• GET two wafers (after process) from Buffer