Chemical Delivery System
Chemical Delivery System is a chemical supply unit used in semiconductor manufacturing processes.
It is mainly applied in cleaning processes to remove slurry and particles, delivering various chemicals reliably to wet process equipment.
Designed specifically for cleanroom applications, it ensures precise control and stable supply of high-purity chemicals.
Key Specifications
| Enclosure | SS400 40 × 40 × 1.5T Frame / White FM PVC 10T |
|---|---|
| System Size | CDS 1800 × 1200 × 2000 mm / Reclaim 600 × 600 × 900 mm |
| Process Tank | PVDF or PTFE / Max. 70 L / 2 Tanks |
| Flow Range | Tank Circulation 0–18 LPM / Chemical Supply 0–26 LPM |
| Temperature | CCS 25–30°C / PT-100Ω |
| Chemical Line | PFA Tube |
| Communication | Configured to customer requirements |
Detailed Configuration
01EnclosureStructure and dimensions
- Frame: SS400, 40 × 40 × 1.5T
- Material: White FM PVC
- Thickness: 10T / Frame Cover 5T
- Door: Interlocked / Window: Clear PVC
- CDS: 1800 × 1200 × 2000 mm, excluding levellers, ±100 mm
- Reclaim: 600 × 600 × 900 mm, excluding levellers, ±50 mm
02Process TankStorage, level control, and standby operation
- Material: PVDF or PTFE selected after chemical compatibility review
- Capacity: Max. 70 L / Quantity: 2 tanks
- Chemical level: Capacitance sensors, LL → L → M → H → HH
- Overflow drain tube for overfill protection
- Temperature sensor: PT-100Ω
- Filtered N₂ purge line to minimize contamination
- Dual-tank process/standby operation
03Bellows PumpCirculation and chemical supply
- Tank circulation: 0–18 LPM
- Chemical supply: 0–26 LPM
- Pump drain with manual gravity drain
- Inlet and outlet pressure sensors for pump trouble detection
- Pulsation damper selected to match the pump specification
04Chemical FilterChemical-specific filtration
- Material: PTFE
- Filter selected according to chemical properties
05Temperature ControlCCS unit and heater
- Temperature control unit: SEMISOL CCS, 25–30°C
- Heater configuration for SC-1 (APM) process
- Optional hot DIW line according to customer requirements
- Cooling water line
- Individual manual pressure vent valve for heater replacement
06Tube LineSupply, return, and utility piping
- Chemical line: PFA tube
- Utility line: SUS316 transitioning to PFA in the chemical zone
- Supply line: Pressure sensor and flow meter for flow monitoring
- Return line: Pressure sensor, flow meter, and back pressure regulator
- Reclaim line with filtration
- Check valve on over-drain line
- Insulation for pump air and high-temperature lines
- Numbering tags on air lines
07DensitometerConcentration monitoring and sampling
- Concentration monitoring during mixed-chemical circulation between process tanks #1 and #2
- DI line for cleaning after concentration measurement
- Densitometer specification selected according to the chemical
- Sampling line for contamination analysis
08Safety & InterfaceDetection, zoning, and customer interface
- Inspection stickers on gauges and name tags on all parts
- Leak sensors in each internal zone
- Separate chemical and electrical zones
- Hook-up utilities configured within the customer scope
- DI water gun
- Communication type configured to customer requirements