High-Purity PFA/PTFE Materials
Fluoropolymer Tube and Fitting configurations designed for the cleanliness and chemical resistance required in semiconductor chemical lines.
PFA/PTFE TUBE & Fitting
PFA/PTFE Tube & Fitting products are high-purity fluoropolymer piping and connection components used in chemical and pneumatic lines for semiconductor equipment. They support a wide range of piping standards and connection methods and can be integrated with PFA valves, regulators, sensors, and other fluid-control components to configure process lines.
- High-purity PFA/PTFE materials for chemical lines
- Multiple Tube & Fitting connection methods for different process conditions
- Suitable for semiconductor processes including CDS, VMB, Wet Bench, and CMP
- Integration with PFA valves, regulators, sensors, and other fluid-control components
Key Features
Multiple Connection Methods
Supports Insert Bushing, Spigot Butt + IR, Flare Link, and other connection methods to suit piping conditions and maintenance requirements.
High-Temperature & Chemical Compatibility
PFA Tube solutions support applications up to 200°C and chemical piping for strong acids, strong alkalis, organic solvents, and other process chemicals.
Integration with PFA Fluid-Control Components
Can be combined with Diaphragm Valves, Precision Regulating Valves, Pressure Regulators, Sensors, and other components to configure complete fluid lines.
Product Specifications
Tube & Fitting Basic Specifications
| Material | PFA / PTFE |
|---|---|
| Product | PFA Tube / PFA Fitting |
| Connection | Insert Bushing · Spigot Butt + IR · Flare Link |
| Tube Temperature | Applications up to 200°C |
| Chemical Resistance | Strong acids · strong alkalis · organic solvents · other chemical environments |
| Application | Semiconductor chemical lines · high-purity fluid piping · pneumatic lines |
| Configuration | Selectable to match piping standards and customer-required dimensions |
Applicable & Related Product Lineup
| Category | Representative Product / Configuration | Key Specifications & Applications |
|---|---|---|
| Air-Operated Diaphragm Valve | DVA Series | 1/8" ~ 1-1/2" · PFA/PTFE · 0~5 bar · 5~120°C · CDS/VMB/Wet Bench/CMP/Chemical Tank |
| Precision Regulating Valve | DV315 | 0.1 mm/rev precision flow adjustment · 432-step flow control · suitable for highly corrosive chemical lines |
| Pressure Reducing Valve | PV317 | Operating pressure 0.08 ~ 0.3 MPa · dynamic regulation · pressure stabilization for chemical lines |
| Other PFA Products | Check Valve · Back Pressure Valve · Custom Valve Block · Sensor | System configuration with Tube/Fitting according to piping purpose and process conditions |