Ultrasonic ToF Measurement
Ultrasonic signal sampling and time-of-flight measurement
This liquid flow measurement system combines ultrasonic time-of-flight technology with PID control and industrial communication. Its ultrasonic sensors and control algorithms provide stable, precise flow measurement and control across different process environments.
Ultrasonic signal sampling and time-of-flight measurement
Velocity and flow calculation with target-based closed-loop feedback control
Motor or regulating actuator control for flow adjustment
Real-time external system communication via EtherCAT and RS-485
| Device Modules | EtherCAT · RS-485 · Power Module |
|---|---|
| Device Standard | ETG.5003.1 Semiconductor Device Standard |
| Interoperability | Common Device Profile (CDP) compliant |
| EtherCAT Slave | EtherCAT standard led by global semiconductor equipment manufacturers |
| Device Profile | ETG.3003.202 Mass Flow Controller SDP |
| Transit-Time Precision | dTOF ≤ 25 ps |
|---|---|
| Ultrasonic Sensor | 1.0 ~ 2.5 MHz |
| Flow Control Channels | 6 channels per module (6 PID loops) |
| Digital / Analog Output | 6 ch · 4~20 mA, 6 ch/module |
| Signal Processing | Transceiver processing · Flow calculation · Compensation algorithm |
| Dimension | 139 × 110 × 39 mm |
|---|---|
| Body Material | PFA |
| Fluid Temperature | 10 ~ 90°C |
| Ambient / Storage | 0 ~ 60°C / 0 ~ 100°C |
| Measurement Method | Transit-time differential (dTOF) |
|---|---|
| Flow Range | 0 ~ 100 mL/min |
| Accuracy | 0~25: ±0.25 mL/min 25~100: ±1% RD |
| Trigger / Receiver Output | 24 V Pulse / 2.0 MHz Min. 150 mV ±5% |