Heat Exchanger & Chemical Circulator
The HE-3320 Series circulates, heats, and cools process chemicals for semiconductor and chemical applications. Its high-purity, fusion-welded PFA tube construction minimizes contamination and leakage at wetted areas while maintaining stable process temperatures.
- ±0.1°C temperature accuracy across a 15~50°C operating range
- High-purity PFA tube with full-welding construction
- Reduced risk of particle and metal contamination
- RS-232, RS-485, and Modbus communication support
Key Technologies & Features
Precision Temperature Control
Peltier modules and current-controlled, polarity-reversing SMPS for precision heating and cooling
High-Purity PFA Tube & Full-Welding Structure
Chemical resistance and cleanliness with fusion-welded piping to reduce leakage risk
Reduced Contamination Risk
Minimized metal and general materials in wetted areas to reduce particle and metal contamination
Remote Control & System Integration
RS-232, RS-485, and Modbus support for remote operation and host-system integration
Specification
| Type | Heat Exchanger |
|---|---|
| Configuration | Module & Controller |
| Temperature Range | 15~50°C |
| Temperature Accuracy | ±0.1°C |
| Max. Heating Capacity | 2,900 W |
| Circulation Flow Range | 15~20 L/min |
| Max. Allowable Pressure | 0.35 MPa |
| Power | AC 220 V, 20 A |
| Dimension – Module | W290 × D300 × H254 mm |
| Dimension – Controller | W165 × D453 × H359 mm |
| Interface | RS-232 / RS-485 / Modbus |
| Material | PFA / FM PVC |
| Application | Chemical circulation & temperature control |